0

Full Content is available to subscribers

Subscribe/Learn More  >

An Experimental Investigation on the Fabrication of Microlens Array Using Meniscus of Photoresist

[+] Author Affiliations
Jae Sung Yoon, Jeong Hwan Kim, Yeong-Eun Yoo, Doo-Sun Choi

Korea Institute of Machinery & Materials (KIMM), Daejeon, Korea

Paper No. IMECE2013-64275, pp. V010T11A039; 5 pages
doi:10.1115/IMECE2013-64275
From:
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME

abstract

This study investigates a fabrication process for microlens and its array. This process is based on the capillary attraction of liquid photoresist, which is trapped within the round holes on the silicon substrate. When the photoresist is spin-coated on the surface of silicon wafer, where round holes or pits have been made in advance, concave meniscuses are made in the holes or pits. Therefore, microlens array can be made by replication of the surface of the photoresist after it is solidified. The geometry of the microlens depends on the spin speed, viscosity of the photoresist and the size of the holes. In this study, the variation of the geometry of the microlens is investigated with various diameters of the holes for different spin speed.

Copyright © 2013 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In