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An Experimental Investigation on the Fabrication of Microlens Array Using Meniscus of Photoresist

[+] Author Affiliations
Jae Sung Yoon, Jeong Hwan Kim, Yeong-Eun Yoo, Doo-Sun Choi

Korea Institute of Machinery & Materials (KIMM), Daejeon, Korea

Paper No. IMECE2013-64275, pp. V010T11A039; 5 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME


This study investigates a fabrication process for microlens and its array. This process is based on the capillary attraction of liquid photoresist, which is trapped within the round holes on the silicon substrate. When the photoresist is spin-coated on the surface of silicon wafer, where round holes or pits have been made in advance, concave meniscuses are made in the holes or pits. Therefore, microlens array can be made by replication of the surface of the photoresist after it is solidified. The geometry of the microlens depends on the spin speed, viscosity of the photoresist and the size of the holes. In this study, the variation of the geometry of the microlens is investigated with various diameters of the holes for different spin speed.

Copyright © 2013 by ASME



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