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Fabrication of Al2O3 Nanopore Sensors for DNA Detection

[+] Author Affiliations
Yin Zhang, Lei Liu, JingJie Sha, Wei Si, Jian Ma, Yunfei Chen

Southeast University, Nanjing, Jiangsu, China

Paper No. IMECE2013-63154, pp. V010T11A033; 4 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME


A novel and facile method on the Al2O3 nanopore fabrication is proposed for DNA molecule detection based on atomic layer deposition (ALD) technique. We prepare three Al2O3 nanopores by using the focused ion beam (FIB) for the reduction of the thick layer and formation of the nanopore. To prove its feasibility and efficiency, experimental investigation is conducted on characterization of the λ-DNA translocation. As compared with the previously made Si3N4 nanopore, blockade current and time of translocation events are similar, but the signal-to-noise ration is improved.

Copyright © 2013 by ASME



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