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Oscillatory Behavior of the Nonlinear Clamped-Free Beam Microgyroscopes Under Electrostatic Actuation and Detection

[+] Author Affiliations
Mahdi Mojahedi, Mohammad Taghi Ahmadian, Keikhosrow Firoozbakhsh

Sharif University of Technology, Tehran, Iran

Ahmad Barari

University of Ontario Institute of Technology, Oshawa, ON, Canada

Paper No. IMECE2013-62214, pp. V010T11A022; 8 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME


Vibratory Micromachined gyroscopes use suspending mechanical parts to measure rotation. They have no gyratory component that require bearings, and for this reason they can be easily miniaturized and batch production using micromachining methods. They operate based on the energy interchange between two modes of structural vibration. The objective of this paper is to study the oscillatory behavior of an electrostatically actuated vibrating microcantilever gyroscope with proof mass at its end. In the modelling, the effects of different nonlinearities, fringing field and base rotation are considered. The microgyroscope is subjected to coupled bending oscillations around the static deflection which are coupled by base rotation. The primary oscillation is generated in drive direction of microgyroscope by applying a pair of DC and AC voltages in the tip mass. Secondary oscillation in sense direction is induced by Coriolis coupling when the beam has the input angular rate along longitudinal axis. Input angular rotation can be measured by sensing oscillation tuned by another DC voltage applied to the proof mass. First a system of nonlinear equations which describes flexural-flexural motion of electrostatically actuated microbeam gyroscopes under input rotation, is derived by extended Hamilton principle. The oscillatory behavior of microgyroscopes is then analytically investigated, where the microgyroscopes are predeformed by DC voltages in both directions. The effects of the nondimensional parameters on the natural frequencies of the system are discussed at the end of the paper.

Copyright © 2013 by ASME
Topics: Microgyroscopes



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