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Structural Behavior of Microbeams Actuated by Out-of-Plane Electrostatic Fringing-Fields

[+] Author Affiliations
Hassen M. Ouakad

King Fahd University of Petroleum and Minerals, Dhahran, Saudi Arabia

Paper No. IMECE2013-65770, pp. V010T11A014; 7 pages
  • ASME 2013 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • San Diego, California, USA, November 15–21, 2013
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5639-0
  • Copyright © 2013 by ASME


In this paper, we present an investigation of the static behavior of a doubly-clamped microbeam actuated electrically through out-of-plane electrostatic fringing-fields. The distributed electrostatic force is caused by the asymmetry of the fringing-fields. This is actually due to the out-of-plane asymmetry of the beam and its two actuating stationary electrodes. The electric force was approximated by means of fitting the results of two-dimensional numerical solution of the electrostatic problem using Finite-Element Method (FEM). Then, a reduced-order model (ROM) was built using the Galerkin decomposition with linear undamped modes of a clamped-clamped beam as base functions. The ROM equations are solved numerically to get the static response of the considered micro-actuator when actuated by a DC load. Results shows possibility of having three different regimes for this particular MEMS device: a bending regime, a catenary regime, and an elastic regime. Eigenvalue problem is then solved to get the variation of the fundamental natural frequency when the system is deflected by a DC load. Results show that controlling the microbeam stroke, with a DC voltage on the gate electrodes, enables us to tune the system frequency, resulting in a possibility of a tunable MEMS device without a pull-in scenario.

Copyright © 2013 by ASME
Topics: Microbeams



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