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Static and Dynamic Modeling of a Multi-Axis Thin-Film Piezoelectric Micro-Actuator

[+] Author Affiliations
Jongsoo Choi, Choong-Ho Rhee, Zhen Qiu, Thomas Wang, Kenn Oldham

University of Michigan, Ann Arbor, MI

Paper No. DSCC2013-4019, pp. V003T37A006; 9 pages
  • ASME 2013 Dynamic Systems and Control Conference
  • Volume 3: Nonlinear Estimation and Control; Optimization and Optimal Control; Piezoelectric Actuation and Nanoscale Control; Robotics and Manipulators; Sensing; System Identification (Estimation for Automotive Applications, Modeling, Therapeutic Control in Bio-Systems); Variable Structure/Sliding-Mode Control; Vehicles and Human Robotics; Vehicle Dynamics and Control; Vehicle Path Planning and Collision Avoidance; Vibrational and Mechanical Systems; Wind Energy Systems and Control
  • Palo Alto, California, USA, October 21–23, 2013
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-5614-7
  • Copyright © 2013 by ASME


Multi-axis (z, θx, θy) micro-actuators based on thin-film lead-zirconate-titanate (PZT) for use in dual axes confocal microscopy are presented with their static and dynamic models. Prototype actuators have achieved as much as 430 μm of vertical displacement and ±10° of mechanical tilting angles in both θx and θy directions in a footprint of 3.2×3.2 mm. The experimental static displacements and transient response of the actuator were used to identify residual stresses in the thin films, dimensional variance due to fabrication limitation, and damping coefficients in the model. With the identified parameters, the model predicts the static displacements of the four corners of the stage with an average absolute error of 17.4 μm over five different voltage levels and shows a reasonable agreement with the experimentally measured transient dynamic data. These results will be used to develop closed-loop controller for the system.

Copyright © 2013 by ASME



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