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Fine Temperature Measurement and Fabrication of On-Chip Whispering-Gallery Mode Micro-Sensors

[+] Author Affiliations
Matthew Frenkel, Marlon Avellan, Zhixiong Guo

Rutgers University, Piscataway, NJ

Paper No. MNHMT2013-22003, pp. V001T09A001; 7 pages
  • ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer
  • ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer
  • Hong Kong, China, December 11–14, 2013
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 978-0-7918-5615-4
  • Copyright © 2013 by ASME


Whispering-Gallery mode based optical micro-devices have been demonstrated to have extremely high sensitivity to changes in local temperature owing to their high quality factors and frequency-based measurements. In this paper, we first examine different fabrication techniques for integrating whispering-gallery mode sensors directly onto heating components to realize on-chip in-situ dynamic temperature measurements and monitoring. The merits and drawbacks of each fabrication technique are discussed. Then, the capability of the fabricated on-chip micro-sensors to perform precise real-time thermal measurements was tested, and the findings are discussed. Finally, the advantages of such on-chip sensors are established through heat transfer analysis.

Copyright © 2013 by ASME



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