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Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation

[+] Author Affiliations
Sangtak Park, Mahmoud Khater, Eihab Abdel-Rahman

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2013-13376, pp. V001T09A015; 5 pages
  • ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems
  • Portland, Oregon, USA, August 4–7, 2013
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5584-3
  • Copyright © 2013 by ASME


In this paper, we derive and present an analytical model of the parallel-plate electrostatic actuator coupled with the resonant drive circuit when it is driven by a frequency-modulated input signal. Using this analytical model, we determine the stability of the fixed points of the actuator without linearization process. Furthermore, we study the effect of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range and stability of the electrostatic actuator.

Copyright © 2013 by ASME



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