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Micro Cantilever Electrostatic Energy Harvester

[+] Author Affiliations
Bashar K. Hammad

The Hashemite University, Zarqa, Jordan

Eihab M. Abdel-Rahman

University of Waterloo, Waterloo, ON Canada

Mohamed A. E. Mahmoud

Ain Shams University, Cairo, Egypt

Paper No. DETC2013-13340, pp. V001T09A014; 7 pages
  • ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems
  • Portland, Oregon, USA, August 4–7, 2013
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5584-3
  • Copyright © 2013 by ASME


In this paper, we present a SDOF model of an energy harvester made up of microcantilever beams with tip mass. We investigate performance utilizing electrostatic actuation mechanism resulted from an electret layer patterned underneath the tip mass. The excitation force is transferred to cantilever beams through the vibration of the fixed end, i.e. the base of the beam. The model accounts for the mechanical and electric parameters as well as the coupling between them, and it includes design parameters by lumping them into nondimensional quantities, thereby allowing an easier understanding of their effects and the interaction between the mechanical and electric forces. We study the static behavior of deflection and electric charge as a function of the DC static voltage. In addition, we simulate the dynamic response, generate the frequency-response curves for a variety of conditions, and notice nonlinear effects.

Copyright © 2013 by ASME



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