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Laser Processing by Using Fluidic Laser Beam Shaper

[+] Author Affiliations
Hong Duc Doan, Naoki Iwatani, Kazuyoshi Fushinobu

Tokyo Institute of Technology, Tokyo, Japan

Paper No. IPACK2013-73059, pp. V001T07A001; 6 pages
doi:10.1115/IPACK2013-73059
From:
  • ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems
  • Volume 1: Advanced Packaging; Emerging Technologies; Modeling and Simulation; Multi-Physics Based Reliability; MEMS and NEMS; Materials and Processes
  • Burlingame, California, USA, July 16–18, 2013
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 978-0-7918-5575-1
  • Copyright © 2013 by ASME

abstract

Laser beam shaping techniques are important to optimize a large number of laser-material processing applications and laser-material interaction studies. The authors have developed a novel fluidic laser beam shaper (FLBS) with merits such as flexiblility, versatility and low cost. This work presents a fundamentally new approach for laser beam shaping by using FLBS. A Gaussian beam profile is transformed to a flat top beam and annular beam profile in the focal plane. The shaped laser beam is used for laser drilling to investigate the influence of the laser intensity profile in laser processing. The paper concludes with suggestions for future research and potential applications for further the work.

Copyright © 2013 by ASME
Topics: Lasers , Laser beams

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