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Highly Sensitive 2D Strain Sensor Using Carbon Nanotube

[+] Author Affiliations
Hiroshi Kawakami, Masato Ohnishi, Ken Suzuki, Hideo Miura

Tohoku University, Sendai, Miyagi, Japan

Paper No. IPACK2013-73156, pp. V001T06A001; 6 pages
doi:10.1115/IPACK2013-73156
From:
  • ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems
  • Volume 1: Advanced Packaging; Emerging Technologies; Modeling and Simulation; Multi-Physics Based Reliability; MEMS and NEMS; Materials and Processes
  • Burlingame, California, USA, July 16–18, 2013
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 978-0-7918-5575-1
  • Copyright © 2013 by ASME

abstract

A new highly sensitive strain measurement method has been developed by applying the strain-induced change of the electronic conductivity of CNTs. It is reported that most multi-walled carbon nanotubes (MWCNTs) show metallic conductivity and they are rather cheap comparing with single-walled carbon nanotubes (SWCNTs). However, it was found that the electric conductivity of MWCNTs changes drastically under uniaxial strain because of the drastic change of their band gap. Therefore, the authors have developed a highly sensitive strain sensor which can detect the local strain distribution by using MWCNTs. In order to design a new sensor using MWCNT, it is very important to control the shape of the MWCNTs under strain. Thus, a method for controlling the shape of the MWCNTs was developed by applying a chemical vapor deposition (CVD) technique. It was found that the shape of the grown MWCNT could be controlled by changing the average thickness of the catalyst and the deposition temperature of the MWCNT. The electrical resistance of the grown MWCNT changed almost linearly with the applied strain, and the maximum strain sensitivity obtained under the application of uniaxial strain was about 10%/1000-μstrain (gauge factor: 100). A two-dimensional strain sensor, which consists of area-arrayed fine bundles of MWCNTs, has been developed by applying MEMS technology. Under the application of compressive strain, the electric resistance was confirmed to increase almost linearly with the applied strain.

Copyright © 2013 by ASME

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