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Mechanics of Buckled Structure MEMS for Actuation and Energy Harvesting Applications

[+] Author Affiliations
Daniel A. Porter, Usha R. Gowrishetty, Isaac J. Phelps, Kevin M. Walsh, Thomas A. Berfield

University of Louisville, Louisville, KY

Paper No. IMECE2012-88646, pp. 49-54; 6 pages
  • ASME 2012 International Mechanical Engineering Congress and Exposition
  • Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B
  • Houston, Texas, USA, November 9–15, 2012
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4525-7
  • Copyright © 2012 by ASME


Buckled structures offer many great benefits to microelectromechanical systems (MEMS), using naturally occurring residual stresses to provide structures with switchable stable states capable of large transverse deflections. In this work a simple, circular bi-layer diaphragm style of buckled MEMS devices is discussed. The buckling behavior of the system, including buckling height and switching criteria, is modeled and analyzed in ANSYS, then compared with theoretical equations and experimental measurements. Results of this work will help to yield optimal design parameters for both energy harvesting and actuation MEMS applications.

Copyright © 2012 by ASME



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