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Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

[+] Author Affiliations
Dumitru I. Caruntu, Israel Martinez

University of Texas Pan American, Edinburg, TX

Paper No. IMECE2012-85963, pp. 389-394; 6 pages
  • ASME 2012 International Mechanical Engineering Congress and Exposition
  • Volume 4: Dynamics, Control and Uncertainty, Parts A and B
  • Houston, Texas, USA, November 9–15, 2012
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4520-2
  • Copyright © 2012 by ASME


The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

Copyright © 2012 by ASME



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