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Improved Probe-Sample Signal Based Modeling of Scanning Probe Microscopes

[+] Author Affiliations
Brian Maxwell, Marvin K. Okorafor, Garrett M. Clayton

Villanova University, Villanova, PA

Paper No. DSCC2012-MOVIC2012-8848, pp. 567-573; 7 pages
  • ASME 2012 5th Annual Dynamic Systems and Control Conference joint with the JSME 2012 11th Motion and Vibration Conference
  • Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Predictive Control; Modeling and Model-Based Control of Advanced IC Engines; Modeling and Simulation; Multi-Agent and Cooperative Systems; Musculoskeletal Dynamic Systems; Nano Systems; Nonlinear Systems; Nonlinear Systems and Control; Optimal Control; Pattern Recognition and Intelligent Systems; Power and Renewable Energy Systems; Powertrain Systems
  • Fort Lauderdale, Florida, USA, October 17–19, 2012
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-4530-1
  • Copyright © 2012 by ASME


In this paper, we present significant improvements to a scanning probe microscope (SPM) modeling technique that uses the SPM’s probe-surface interaction signal to model the lateral dynamics of the SPM. The fundamental idea behind this modeling method is to use the topography signal resulting from a sinusoidal scan of a known calibration surface to develop a transfer function model of the AFM dynamics. This method is useful in situations where sensors are either unavailable, insufficient, or require independent calibration. The method is experimentally implemented to model a commercial atomic force microscope system (AFM).

Copyright © 2012 by ASME



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