Full Content is available to subscribers

Subscribe/Learn More  >

Uncertainty Quantification in Nonlinear Resonant MEMS

[+] Author Affiliations
Rajat Goyal, Anil K. Bajaj

Purdue University, West Lafayette, IN

Paper No. DETC2012-71462, pp. 11-20; 10 pages
  • ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: 1st Biennial International Conference on Dynamics for Design; 14th International Conference on Advanced Vehicle Technologies
  • Chicago, Illinois, USA, August 12–15, 2012
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4505-9
  • Copyright © 2012 by ASME


This work is focused on Uncertainty Quantification (UQ) in a nonlinear MEMS T-beam structure exhibiting 1:2 autoparametric internal resonance. The study is presented by elaborating on the sources of uncertainty in fabrication and operation of the device and their quantification. Nonlinear response of the system is formulated by using a two-mode model constructed with lowest two linear modes of the structure in conjunction with the nonlinear Lagrangian representing the dynamics of the beam structure as well as the excitation mechanism. Thus UQ for the nonlinear resonant MEMS is carried out in two steps. First, propagation and quantification in linear analysis outputs namely mode shapes, natural frequencies and tuning, and secondly, UQ on nonlinear response obtained from averaged equations determined by the averaged Lagrangian. In this paper, applications of UQ techniques on linear part are presented and effects of various parameteric uncertainties on model output are brought out. Sensitivity analysis is performed to reduce the number of parameters and a comparison of sensitivity analysis with sampling is done to establish the accuracy of the method. Response surface analysis is performed using generalized polynomial chaos (gPC) to generate an analytical expression for multi-dimensional uncertainty. A detailed description of the gPC collocation method is also presented. A comparison of response surface method with direct sampling is done to illustrate the efficiency and accuracy of gPC collocation technique for up to 5 uncertain parameters.

Copyright © 2012 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In