Full Content is available to subscribers

Subscribe/Learn More  >

GPU-Based Parallel Simulation of Silicon Anisotropic Etching

[+] Author Affiliations
Jianhua Li, Jingyuan Chen, Li Yan

East China University of Science and Technology, Shanghai, China

Yan Wang

Georgia Institute of Technology, Atlanta, GA

Paper No. DETC2012-71267, pp. 819-829; 11 pages
  • ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 2: 32nd Computers and Information in Engineering Conference, Parts A and B
  • Chicago, Illinois, USA, August 12–15, 2012
  • Conference Sponsors: Design Engineering Division, Computers and Information in Engineering Division
  • ISBN: 978-0-7918-4501-1
  • Copyright © 2012 by ASME


Silicon anisotropic etching simulation, based on geometric model or cellular automata (CA) model, is highly time-consuming. In this paper, we propose two parallelization methods for the simulation of the silicon anisotropic etching process with CA models on graphics processing units (GPUs). One is the direct parallelization of the serial CA algorithm, and the other is to use a spatial parallelization strategy where each crystal unit cell is allocated to a thread in GPU. The proposed simulation methods are implemented with the Compute Unified Device Architecture (CUDA) application programming interface. Several computational experiments are taken to analyze the efficiency of the methods.

Copyright © 2012 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In