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Analysis and Design of a Robust RF MEMS Switch

[+] Author Affiliations
Ibrahim Chamseddine, Hadi Kasab, Maya Antoun, Tawfiq Dahdah, Mohammed Mirhi, Issam Lakkis

American University of Beirut, Beirut, Lebanon

Paper No. ESDA2012-82567, pp. 429-435; 7 pages
  • ASME 2012 11th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 2: Applied Fluid Mechanics; Electromechanical Systems and Mechatronics; Advanced Energy Systems; Thermal Engineering; Human Factors and Cognitive Engineering
  • Nantes, France, July 2–4, 2012
  • Conference Sponsors: International
  • ISBN: 978-0-7918-4485-4
  • Copyright © 2012 by ASME


A MEMS RF switch is expected to undergo 10 billion switching cycles before failure. Until complete physical explanation for these failure modes that include contact adhesion, damping effects, stiction, increases in resistance with time, dielectric breakdown, and electron trapping is fully established, the technology’s numerous advantages cannot be harvested reliably and efficiently. This paper investigates prospective solutions to problems in switch designs by proposing a new design for the switch. We consider the new design from different perspectives: dynamic, electric, fluidic, etc. It is billed to overcome the difficulties and involves the implementation of liquid metal contact electrostatically actuated to ensure the same switching performance, with prolonged life span, and robust switching speed.

Copyright © 2012 by ASME



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