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Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation

[+] Author Affiliations
Bongsang Kim, Rob N. Candler, Matthew Hopcroft, Manu Agarwal, Woo-Tae Park, Jeffrey T. Li, Thomas Kenny

Stanford University

Paper No. IMECE2004-61727, pp. 413-416; 4 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4714-4 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1 °C. A separate experiment was also initiated to show stability during temperature cycling from −50°C to 80 °C. In both experiments, the total change in resonant frequency were less than 10 ppm and quality factor less than 10%, which demonstrates the stability of encapsulated micromechanical resonators upon exposure to harsh environments.

Copyright © 2004 by ASME



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