0

Full Content is available to subscribers

Subscribe/Learn More  >

Improved Modeling of Non-Continuum Heat Transfer During Topographical Imaging With a Heated Atomic Force Microscope Cantilever

[+] Author Affiliations
Nathan D. Masters, Wenjing Ye, William P. King

Georgia Institute of Technology

Paper No. IMECE2004-60046, pp. 165-172; 8 pages
doi:10.1115/IMECE2004-60046
From:
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4714-4 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME

abstract

Thermal Sensing Atomic Force Microscopy (TSAFM) is a promising new technology for topographical imaging and high density data storage that uses the heat transfer between a heated cantilever and the scanned surface as the sensing mechanism. Due to the small operational scan heights (<300 nm), continuum gas phase heat transfer models (as used in previous studies) cannot accurately describe the actual behavior—affecting the accuracy of data interpretation and design of TSAFM systems. In this study two models (Direct Simulation Monte Carlo and a kinetic theory based macro model) are developed to explore the impact of sub-continuum heat conduction on TSAFM operation and to facilitate improved data interpretation and design.

Copyright © 2004 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In