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Direct Synthesis and Self-Assembly of Silicon Nanowires

[+] Author Affiliations
Ongi Englander, Dane Christensen, Jongbaeg Kim, Liwei Lin

University of California at Berkeley

Paper No. IMECE2004-62047, pp. 525-531; 7 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


The direct synthesis and self-assembly of silicon nanowires to yield a two-terminal, nano-to-micro integrated system has been demonstrated. The process takes advantage of localized heating to initiate and sustain a bottom up nanowire synthesis mechanism. As soon as the nanowire synthesis process is complete, the integrated system is ready for characterization of mechanical and electrical properties as well as functionalization for sensing applications. The process is CMOS compatible and eliminates the nano-to-micro contact formation process that is currently required of traditional processes.

Copyright © 2004 by ASME



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