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Development of Nano-Scale Reusable Quartz Master for the Fabrication of Nickel Stampers

[+] Author Affiliations
Young Ho Seo, Doo-Sun Choi, Yeong-Eun Yoo, Tae-Jin Je, Kyung-Hyun Whang

Korea Institute of Machinery and Materials

Paper No. IMECE2004-59144, pp. 477-480; 4 pages
doi:10.1115/IMECE2004-59144
From:
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME

abstract

In this paper, we present reusable quartz master fabricated by electron-beam lithography and dry etching process of quartz, and results of injection molding based on the reusable quartz master for the manufacturing of nano-scale information media. Since patterned structures of photoresist can be easily damaged by separation (demolding) process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quartz in nickel stamper fabrication process. We have designed and fabricated four different specimens including 100nm, 140nm, 200nm and 400nm pit patterns. In addition, both intaglio and embossed carving patterns are fabricated for each specimen. In the preliminary test of injection molding, we have fabricated polycarbonate patterns with varying mold temperature. We have experimentally verified the fabrication process of the reusable quartz master and possibility of quartz master as direct stamper.

Copyright © 2004 by ASME

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