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Packaging Hand-Held MEMS — MinIMEs (Miniature Integration of MEMS/Electronics)

[+] Author Affiliations
Kenneth R. Pohl, Daryl Dagel, Paul Galambos

Sandia National Laboratories

Paper No. IMECE2004-60879, pp. 319-326; 8 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


In this paper we present two complete MEMS microsystems, one optical and one microfluidic, with associated packaging, light sources, signal modulation, optics, fluid connections and flow control. These are fully functional hand held devices and as such demonstrate a means of freeing the MEMS device from the laboratory environment and inserting it into the field. This highly integrated packaging concept can be applied to a wide range of surface micromachined MEMS, and probably other non-surface micromachined MEMS devices, which are generally easier to package.

Copyright © 2004 by ASME



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