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Low Temperature Wafer Bonding in Medium Vacuum

[+] Author Affiliations
W. B. Yu, C. M. Tan, S. S. Deng

Nanyang Technological University

J. Wei

Singapore Institute of Manufacturing Technology

Paper No. IMECE2004-60454, pp. 303-307; 5 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


Direct wafer bonding was performed under medium vacuum condition. The effect of the sequence of wafers contact and vacuum application, plasma treatment, and annealing temperature on the bonding quality was investigated. From the comparison of the bonding efficiency, contacting two wafers in air rather than in vacuum produces much less bubbles. Besides, it was also found that ex-situ plasma treatment degrades the bonding quality. It is believed that the degradation is caused by contamination and damage induced by the plasma treatment before vacuum wafer bonding. For vacuum bonding without plasma treatment, good bonding can be achieved at temperature as low as 300 °C.

Copyright © 2004 by ASME



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