0

Full Content is available to subscribers

Subscribe/Learn More  >

Mechanical Simulation for the Robust Design of RF-MEMS Switches

[+] Author Affiliations
Zhengfang Qian, Joe Tomase, Keryn Lian

Motorola, Inc.

Paper No. IMECE2004-60112, pp. 295-301; 7 pages
doi:10.1115/IMECE2004-60112
From:
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME

abstract

Mechanical models and analytical solutions have been developed for the RF-MEMS switches under electrical actuation, forced vibration, and shock/impact loading conditions. The basic structure based on cantilever beam switches has been used as model system to illustrate the static and dynamic responses. Analytical solutions for folded beam structures have been furthermore derived and combined with the model system as an effective beam. These characterizations are used to define reliability and performance criteria for the robust design, performance evaluation, and rapid reliability assessment of RF-MEMS switch devices. It was found that the actuation voltage depends on several key design parameters and material properties. Actual acceleration to tiny switch structure is found only one portion of applied acceleration under shock/impact conditions, depending on system stiffness.

Copyright © 2004 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In