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Mechanical Simulation for the Robust Design of RF-MEMS Switches

[+] Author Affiliations
Zhengfang Qian, Joe Tomase, Keryn Lian

Motorola, Inc.

Paper No. IMECE2004-60112, pp. 295-301; 7 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


Mechanical models and analytical solutions have been developed for the RF-MEMS switches under electrical actuation, forced vibration, and shock/impact loading conditions. The basic structure based on cantilever beam switches has been used as model system to illustrate the static and dynamic responses. Analytical solutions for folded beam structures have been furthermore derived and combined with the model system as an effective beam. These characterizations are used to define reliability and performance criteria for the robust design, performance evaluation, and rapid reliability assessment of RF-MEMS switch devices. It was found that the actuation voltage depends on several key design parameters and material properties. Actual acceleration to tiny switch structure is found only one portion of applied acceleration under shock/impact conditions, depending on system stiffness.

Copyright © 2004 by ASME



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