Full Content is available to subscribers

Subscribe/Learn More  >

Micro-Scaled Surface Profile Measurement on Packages by Digital Projection Moiré

[+] Author Affiliations
Chia-Shou Chang, Enboa Wu

National Taiwan University

Ching-An Shao

Chin Min Institute of Technology

Paper No. IMECE2004-59913, pp. 161-166; 6 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4707-1 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


With the rapid trend for miniaturization of electronic products, new optical techniques are increasingly needed for measuring the surface profile or deflection/warpage in the micro-scale for electronic packages mounted on printed circuit boards. In this paper, we reduced the grating spacing of the digital projection moiré (DPM) by directing the grating pattern into a stereo zoom microscope and performed surface profile measurement under this microscope. In this method, the reference grating is generated digitally having sinusoidal intensity. Another digitally generated grating is projected by the means of a digital light processing (DLP) projector and a set of carefully arranged optical lens into the microscope to form the object grating. The pitch of micro-scaled object gratings can be adjusted by the reduction ratio of the microscope. As a result, this micro-scaled digital projection moiré method produces micro object gratings on the order of 10-um pitch and is suitable for surface profile measurement in a square dimension on the order of 100-um. The method of linear mismatch is utilized to obtain more fringes in each measurement and the guideline to achieve the optimal degree of linear mismatch between the reference and the object gratings is proposed. In addition, the phase shifting technique is employed to extract the data between the recorded fringes. Verification of the method is demonstrated by measuring an inclined plane of a micro prism. The deviation between the measured data and the given values was found to be less than 5%, which demonstrates the validity of the developed method.

Copyright © 2004 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In