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Stability Analysis of a Linearized MEMS

[+] Author Affiliations
A. Khazaei

Newcomb & Boyd Consulting Engineering Group

M. Rastgaar Aagaah, M. Mahinfalah, N. Mahmoudian, G. Nakhaie Jazar

North Dakota State University

Paper No. IMECE2004-60841, pp. 185-188; 4 pages
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Applied Mechanics
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Applied Mechanics Division
  • ISBN: 0-7918-4702-0 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME


This paper presents the stability theory and dynamic behavior of a micro-mechanical parametric-effect resonator. The device is a MEMS time-varying capacitor. The nonlinear dynamics of the MEMS are investigated analytically, and numerically. Applying perturbation methods, and deriving an analytical equation to describe the frequency response of the system enables the designer to study the effect of changes in the system parameters that can be used for design and optimization of the system.

Copyright © 2004 by ASME



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