0

Full Content is available to subscribers

Subscribe/Learn More  >

Stability Analysis of a Linearized MEMS

[+] Author Affiliations
A. Khazaei

Newcomb & Boyd Consulting Engineering Group

M. Rastgaar Aagaah, M. Mahinfalah, N. Mahmoudian, G. Nakhaie Jazar

North Dakota State University

Paper No. IMECE2004-60841, pp. 185-188; 4 pages
doi:10.1115/IMECE2004-60841
From:
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Applied Mechanics
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Applied Mechanics Division
  • ISBN: 0-7918-4702-0 | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME

abstract

This paper presents the stability theory and dynamic behavior of a micro-mechanical parametric-effect resonator. The device is a MEMS time-varying capacitor. The nonlinear dynamics of the MEMS are investigated analytically, and numerically. Applying perturbation methods, and deriving an analytical equation to describe the frequency response of the system enables the designer to study the effect of changes in the system parameters that can be used for design and optimization of the system.

Copyright © 2004 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In