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Infrared Micro-Particle Image Velocimetry of Fluid Flow in Silicon-Based Microdevices

[+] Author Affiliations
Dong Liu, Suresh V. Garimella, Steve T. Wereley

Purdue University, West Lafayette, IN

Paper No. HT-FED2004-56385, pp. 399-405; 7 pages
  • ASME 2004 Heat Transfer/Fluids Engineering Summer Conference
  • Volume 4
  • Charlotte, North Carolina, USA, July 11–15, 2004
  • Conference Sponsors: Heat Transfer Division and Fluids Engineering Division
  • ISBN: 0-7918-4693-8 | eISBN: 0-7918-3740-8
  • Copyright © 2004 by ASME


A non-intrusive diagnostic technique, infrared micro-particle image velocimetry (IR-PIV), is developed for measuring flow fields within MEMS devices with micron-scale resolution. This technique capitalizes on the transparency of silicon in the infrared region, and overcomes the limitation posed by the lack of optical access with visible light to sub-surface flow in silicon-based micro-structures. Experiments with laminar flow of water in a circular micro-capillary tube of hydraulic diameter 255 μm demonstrate the efficacy of this technique. The experimental measurements agree very well with velocity profiles predicted from laminar theory. Cross-correlation and auto-correlation algorithms are employed to measure very-low and moderate-to-high velocities, respectively; the former approach is suitable for biomedical applications while the latter would be needed for measurements in electronics cooling. The results indicate that the IR-PIV technique effectively extends the application of regular micro-PIV techniques, and has great potential for flow measurements in silicon-based microdevices.

Copyright © 2004 by ASME



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