0

Full Content is available to subscribers

Subscribe/Learn More  >

Optical and Heat Transfer Characteristics in a Rapid Thermal Annealing System for LCD Manufacturing Procedures

[+] Author Affiliations
Seong Hyuk Lee, Young Ki Choi

Chung-Ang University

Hyoung June Kim, Seungho Park

Hongik University

Dong Hoon Shin

Viatron Technologies, Inc.

Joon Sik Lee

Seoul National University

Paper No. IMECE2004-61088, pp. 527-533; 7 pages
doi:10.1115/IMECE2004-61088
From:
  • ASME 2004 International Mechanical Engineering Congress and Exposition
  • Heat Transfer, Volume 3
  • Anaheim, California, USA, November 13 – 19, 2004
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 0-7918-4711-X | eISBN: 0-7918-4178-2, 0-7918-4179-0, 0-7918-4180-4
  • Copyright © 2004 by ASME

abstract

The objectives of this article are to suggest a way to evaluate the quality of polycrystalline silicon film from the thin film optics analysis and also to investigate the heat transfer characteristics in a rapid thermal annealing system for LCD manufacturing. The characteristic transmission matrix method is used to calculate the transmittance, and the predictions are compared with the experimental data for two different samples. The transient and one-dimensional conductive and radiative heat transfer equations are additionally solved to predict the surface temperatures of thin films. The two-flux method is also used for radiation and the ray-tracing method is utilized to consider the wave interference. As the film thickness increases, the peak transmittance increases and the wavelength for the peak becomes longer due to wave interferences. These characteristics can be used for in-situ and practical estimation of the silicon film quality during the crystallization process. From thermal analysis, it is shown that the selective heating in the multilayer film structure acts as an important mechanism during the annealing of silicon film deposited on the glass.

Copyright © 2004 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In