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Design Optimization of a Linear-Motion Large-Displacement Micro Mechanism for High Off-Axis Stiffness

[+] Author Affiliations
David G. Smith, Gerrit T. Larsen, Larry L. Howell

Brigham Young University, Provo, UT

Paper No. DETC2009-87301, pp. 459-464; 6 pages
doi:10.1115/DETC2009-87301
From:
  • ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies
  • San Diego, California, USA, August 30–September 2, 2009
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4903-3 | eISBN: 978-0-7918-3856-3
  • Copyright © 2009 by ASME

abstract

This paper presents research on the large-displacement linear-motion planar compliant mechanism (X-Bob) specific to MEMS applications. The X-Bob’s potential for high off-axis stiffness makes it a strong candidate for precision MEMs applications. Understanding the characteristics and performance of the X-Bob can lead to the ability to modify it to fit specific applications. In this work, an X-Bob design is optimized for increased off-axis stiffness while maintaining a small footprint. The results are compared to previous X-Bob designs and to folded beam suspensions. Advantages and disadvantages of each design are explained.

Copyright © 2009 by ASME

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