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Dual Approach for Electromechanical Coupling in MEMS

[+] Author Affiliations
Véronique Rochus, Jean-Claude Golinval, Christophe Geuzaine

University of Liège, Liège, Belgium

Paper No. DETC2009-87791, pp. 255-262; 8 pages
  • ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 2: 29th Computers and Information in Engineering Conference, Parts A and B
  • San Diego, California, USA, August 30–September 2, 2009
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4899-9 | eISBN: 978-0-7918-3856-3
  • Copyright © 2009 by ASME


In this paper we present an approach for the computation of coupled electromechanical problems in micro-electromechanical systems based on a vector potential formulation of the electrostatic problem. This formulation is the dual of the scalar potential approach commonly used in the literature. We present an analytic derivation of the force computed using this dual method based on the virtual work principle, and compare the primal and dual approaches on the finite element solution of simple two-dimensional test-cases.

Copyright © 2009 by ASME



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