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An Investigation of the Damping Effects of Various Gas Environments on a Vibratory MEMS Device

[+] Author Affiliations
Seong Jin Kim, Robert Dean, Robert Jackson, George Flowers

Auburn University, Auburn, AL

Paper No. DETC2009-87640, pp. 1471-1477; 7 pages
doi:10.1115/DETC2009-87640
From:
  • ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 1: 22nd Biennial Conference on Mechanical Vibration and Noise, Parts A and B
  • San Diego, California, USA, August 30–September 2, 2009
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4898-2 | eISBN: 978-0-7918-3856-3
  • Copyright © 2009 by ASME

abstract

An experimental investigation of the damping effects in several different gas chemistries on a vibrating micromachined structure was conducted. A corresponding numerical study using an analytical model was also performed and the results correlated with the experimental observations. Both the experimental setup/procedure and the analytical model are described in detail. A summary of the results is presented and conclusions/observations discussed.

Copyright © 2009 by ASME

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