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Quantification of Friction Force for Dual-Axis Probe Friction Force Microscope

[+] Author Affiliations
Hiroaki Amakawa, Kenji Fukuzawa, Mitsuhiro Shikida, Hedong Zhang, Shitaro Itoh

Nagoya University, Nagoya, Japan

Paper No. IJTC2009-15241, pp. 39-41; 3 pages
  • ASME/STLE 2009 International Joint Tribology Conference
  • ASME/STLE 2009 International Joint Tribology Conference
  • Memphis, Tennessee, USA, October 19–21, 2009
  • Conference Sponsors: Tribology Division
  • ISBN: 978-0-7918-4895-1 | eISBN: 978-0-7918-3862-4
  • Copyright © 2009 by ASME


Conventional friction force microscopes (FFMs) had the disadvantage of low force sensitivity due to mechanical interference between torsion caused by friction force and deflection by normal force. In order to overcome disadvantage, we developed a dual-axis micro-mechanical probe, which measures the lateral force by the double cantilever and the vertical force by the torsion beam. However, the calibration method of the lateral force has not been established. In this study, we present a new calibration method using a step-structure.

Copyright © 2009 by ASME



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