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Hypersonic Plasma Particle Deposition of Nanostructured Coatings and Micropatterns

[+] Author Affiliations
J. Hafiz, R. Mukherjee, X. Wang, W. Mook, J. V. R. Heberlein, P. H. McMurry, W. W. Gerberich, S. L. Girshick

University of Minnesota, Minneapolis, MN

Paper No. NANO2004-46029, pp. 101-102; 2 pages
  • ASME 2004 3rd Integrated Nanosystems Conference
  • Design, Synthesis, and Applications
  • Pasadena, California, USA, September 22–24, 2004
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4177-4 | eISBN: 0-7918-3749-1
  • Copyright © 2004 by ASME


Nanostructured materials are attractive candidates for advanced friction and wear-resistant coatings due to their potentially enhanced mechanical properties. We have developed a one-step method called hypersonic plasma particle deposition [1] to produce and deposit nanoparticles using a thermal plasma reactor. Particle synthesis is achieved by dissociating vapor phase reactants in the plasma, and quenching the hot gas in a supersonic nozzle expansion. Particles are deposited on a substrate by hypersonic impaction to form a film, or are deposited as micropatterns using a process called focused particle beam deposition [2]. In-situ particle size distribution measurements are performed using a sampling probe interfaced to an extraction/dilution system for measurement by a scanning electrical mobility spectrometer.

Copyright © 2004 by ASME



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