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Dynamic Analysis of Three Parallel Beams With Electrostatic Force Interaction

[+] Author Affiliations
Pezhman A. Hassanpour, Patricia M. Nieva, Amir Khajepour

University of Waterloo, Waterloo, ON, Canada

Paper No. IMECE2011-64000, pp. 635-642; 8 pages
  • ASME 2011 International Mechanical Engineering Congress and Exposition
  • Volume 7: Dynamic Systems and Control; Mechatronics and Intelligent Machines, Parts A and B
  • Denver, Colorado, USA, November 11–17, 2011
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5493-8
  • Copyright © 2011 by ASME


In this paper, the dynamics of a micro-machined structure with three parallel cantilevers is investigated. The cantilevers are electrically charged and apply electrostatic force to each other. The governing equations of motion are derived using Euler-Bernoulli beam theory and considering structural modal damping. The stability condition of the beams for various electric charges is also studied. In addition, the equations of motion are integrated to obtain the response of the beams in time-domain for a range of initial conditions. This response is used to study the behavior of the beams at the stability margin. The end application of the structure under investigation is in the device characterization. The dynamic stability condition and time-domain responses are used to investigate the reliability of the characterization. Once translated back to physical quantities, these results can be used for improving the measurements.

Copyright © 2011 by ASME



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