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Post-Release Displacement Uncertainty of Micro-Cantilevers Due to Anchor Over/Under Etching

[+] Author Affiliations
Anurag Garg, Joshua Small, Xiaoguang Liu, Sean Scott, Dimitrios Peroulis

Purdue University, West Lafayette, IN

Paper No. IMECE2008-68008, pp. 463-466; 4 pages
  • ASME 2008 International Mechanical Engineering Congress and Exposition
  • Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B
  • Boston, Massachusetts, USA, October 31–November 6, 2008
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4874-6 | eISBN: 978-0-7918-3840-2
  • Copyright © 2008 by ASME


In this paper we follow an analytical and finite element modeling approach to study the effect of anchor over/under-etch on the post-release tip displacement of MEMS cantilever beams. We show that the last release step is particularly critical in controlling the beam’s post-release displacement, which is of primary importance in a variety of applications. In this paper we isolate the effects of mean stress and imperfect anchor. We assume negligible gradient stress since its effect has been studied in detail in the literature. Beams with perfect anchors and zero under-etch are also presented for comparison. The results emphasize that through careful control of the fabrication parameters and anchor structure, the initial displacement profile and thus performance of micro-cantilevers can be accurately controlled.

Copyright © 2008 by ASME



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