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Performance Characteristics of a Variable Density Pin Array Micro-Heat Exchanger

[+] Author Affiliations
George Papadopoulos, Nicholas Tiliakos, Gabriel Benel

ATK GASL, Ronkonkoma, NY

Paper No. IMECE2011-62888, pp. 1037-1044; 8 pages
doi:10.1115/IMECE2011-62888
From:
  • ASME 2011 International Mechanical Engineering Congress and Exposition
  • Volume 6: Fluids and Thermal Systems; Advances for Process Industries, Parts A and B
  • Denver, Colorado, USA, November 11–17, 2011
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5492-1
  • Copyright © 2011 by ASME

abstract

The design, fabrication and preliminary performance of a variable density pin array micro heat exchanger for micro-cooling applications is reported. Various pin diameters and density configurations were analyzed for their ability to provide maximum uniform heat transfer over the active area of the micro-heat exchanger using air as the working fluid for maximum mass flow rates through the micro-heat exchanger in the range of 40 mg/sec to 60 mg/sec. Fabrication of the micro-heat exchanger was performed using deep reactive ion etching (DRIE) technique on a 0.5 mm thick silicon wafer with nominal feature sizes in the range of 5 microns to 20 microns. Performance data is presented based on analysis and comparison to a baseline configuration with no pins.

Copyright © 2011 by ASME

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