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Design, Analysis and Optimization of Magnetic Microactuators

[+] Author Affiliations
Qingkun Zhou, Dapeng Fan

National University of Defense Technology, Changsha, Hunan, China

Pinhas Ben-Tzvi

The George Washington University, Washington, DC

Azhar Iqbal

University of Toronto, Toronto, ON, Canada

Paper No. IMECE2009-12765, pp. 503-512; 10 pages
  • ASME 2009 International Mechanical Engineering Congress and Exposition
  • Volume 12: Micro and Nano Systems, Parts A and B
  • Lake Buena Vista, Florida, USA, November 13–19, 2009
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4385-7 | eISBN: 978-0-7918-3863-1
  • Copyright © 2009 by ASME


Magnetic micro-electro-mechanical-systems (MEMS) present new class of micro-scale devices that incorporate magnetic materials as sensing or active elements. It exploits the properties of magnetic materials by incorporating them in conventional microfabricated systems. Although their application for microactuation purposes has been limited, the prospects of remote control and large displacements renders them useful, and even unavoidable in certain circumstances. Recognizing the fact that poor electromagnetic flux in micro domain happens to be the most stringent limitation, measures to improve the magnetic field generated by an electromagnetic coil are studied using a microactuator that incorporates a coil and a hard magnetic film deposited on a flexure membrane. This paper describes the design of the microactuator, analysis and optimization that maximizes the deflection. This study also presents an overview of magnetic microactuators covering the scaling effects, materials and processes used in their fabrication and critical review of their limitations.

Copyright © 2009 by ASME



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