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Nano-Watt Heat Flux Sensor Considering Contact Resistance at Thermopile Junctions

[+] Author Affiliations
Sung-Ki Nam, Su-Heon Jeong, Sun-Kyu Lee

Gwang-ju Institute of Science and Technology, Gwang-ju, Republic of Korea

Paper No. IMECE2011-65040, pp. 947-948; 2 pages
  • ASME 2011 International Mechanical Engineering Congress and Exposition
  • Volume 2: Biomedical and Biotechnology Engineering; Nanoengineering for Medicine and Biology
  • Denver, Colorado, USA, November 11–17, 2011
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5488-4
  • Copyright © 2011 by ASME


This paper presents design and fabrication procedures for nano-Watt resolution of heat flux sensor. To enhance the resolution, a contact resistance of thermopile is especially focused. CMOS (Complementary Metal-Oxide Semiconductor-compatible) process was used for deposition of gold and chromium which are composed of thermopile. The most important part of thermopile is the contact region of the junctions which generate electrical noises as well as thermoelectric power. The effect of contact conditions at junction point was investigated. The fabricated sensor has 100 thermocouples connected in series and its active junction is on the membrane which directly affects the sensitivity. Developed sensor system provides 0.0629V/nW of sensitivity and 1nW of high resolution.

Copyright © 2011 by ASME



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