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Remotely Powered, Hermetic RF MEMS Pressure Sensor

[+] Author Affiliations
E. Andarawis, E. Berkcan, B. Kashef

General Electric Global Research Center, Niskayuna, NY

Paper No. IMECE2008-68992, pp. 259-263; 5 pages
doi:10.1115/IMECE2008-68992
From:
  • ASME 2008 International Mechanical Engineering Congress and Exposition
  • Volume 2: Biomedical and Biotechnology Engineering
  • Boston, Massachusetts, USA, October 31–November 6, 2008
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4863-0 | eISBN: 978-0-7918-3840-2
  • Copyright © 2008 by ASME

abstract

We have recently successfully developed a remote powered wireless MEMS pressure sensors for sensing pressure in remote locations without wiring or tether. The sensor is hermetically sealed, self-powered using RF energy, and has the ability to auto-compensate to remove various error sources. This constitutes a highly innovative approach to remote sensing while removing major limitations of RFID like sensors.

Copyright © 2008 by ASME

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