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A Two Degree of Freedom Nanopositioner With Electrothermal Actuator for Decoupled Motion

[+] Author Affiliations
Yong-Sik Kim, Nicholas G. Dagalakis

National Institute of Standards and Technology, Gaithersburg, MD

Satyandra K. Gupta

University of Maryland at College Park, College Park, MD

Paper No. DETC2011-48619, pp. 447-457; 11 pages
  • ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference
  • Washington, DC, USA, August 28–31, 2011
  • Conference Sponsors: Design Engineering Division and Computers and Information in Engineering Division
  • ISBN: 978-0-7918-5484-6
  • Copyright © 2011 by ASME


Building a two degree-of-freedom (2 DOF) MEMS nanopositioner with decoupled X-Y motion has been a challenge in nanopositioner design. In this paper a novel design concept on making the decoupled motion of the MEMS nanopositioner is suggested. The suggested nanopositioner has two electrothermal actuators and employs a fully nested motion platform with suspended anchors. The suggested MEMS nanopositioner is capable of delivering displacement from the electrothermal actuator to the motion platform without coupled motion between the two X-Y axes. The design concept, finite element analysis (FEA) results, fabrication procedures and the performance of the 2 DOF nanopositioner is presented. In order to test the nanopositioner moving platform decoupled motion, one actuator moves the platform by 60 μm, while the other actuator is kept at the same position. The platform position cross talk error was measured to be less than 1 μm standard deviation.

Copyright © 2011 by ASME



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