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Study on Model Predictive Control to Minimize Temperature Change of Vertical Plate With Varying Heat Generation

[+] Author Affiliations
Shigeki Hirasawa, Shinya Ito, Kazuya Koike

Kobe University, Kobe, Hyogo, Japan

Paper No. IMECE2009-10206, pp. 7-13; 7 pages
  • ASME 2009 International Mechanical Engineering Congress and Exposition
  • Volume 9: Heat Transfer, Fluid Flows, and Thermal Systems, Parts A, B and C
  • Lake Buena Vista, Florida, USA, November 13–19, 2009
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4382-6 | eISBN: 978-0-7918-3863-1
  • Copyright © 2009 by ASME


Precise process temperature control of 0.001°C under circumstances of noise-temperature change of 0.1°C is required in semiconductor manufacturing process. We studied optimum control method to minimize temperature change at an object position in a 2-dimensional vertical plate with a varying noise-heat-generation and a control-heater. We numerically calculated 2-dimensional unsteady thermal conduction in the plate with feedback control, feed-forward control, and model predictive control of the control-heat-generation. The temperature change at the object position can be decreased 1/80 times smaller than that without control-heat-generation using the feedback control with two monitoring temperatures. The temperature change at the object position can be decreased 1/1000 times (0.002°C) using the model predictive control of 5 s interval with step response pattern as a dynamic predictive model. We found that the accuracy of the dynamic predictive model is very important for precise temperature control. Experiment was performed for the model predictive control with a network model as the dynamic predictive model, and the experimental result agreed with the calculation result.

Copyright © 2009 by ASME



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