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Thermal Reflow Process for Glass Microlens Manufacturing

[+] Author Affiliations
Yang Chen, Allen Y. Yi

The Ohio State University, Columbus, OH

Donggan Yao

Georgia Institute of Technology, Atlanta, GA

Fritz Klocke, Guido Pongs

Fraunhofer Institute for Production Technology, Aachen, Germany

Paper No. MSEC_ICMP2008-72459, pp. 417-421; 5 pages
doi:10.1115/MSEC_ICMP2008-72459
From:
  • ASME 2008 International Manufacturing Science and Engineering Conference collocated with the 3rd JSME/ASME International Conference on Materials and Processing
  • ASME 2008 International Manufacturing Science and Engineering Conference, Volume 2
  • Evanston, Illinois, USA, October 7–10, 2008
  • Conference Sponsors: Manufacturing Engineering Division
  • ISBN: 978-0-7918-4852-4 | eISBN: 978-0-7918-3836-6
  • Copyright © 2008 by ASME

abstract

This fabrication process includes three major steps, i.e., fabrication of glassy carbon molds with arrays of micro size holes, glass compression molding to create micro cylinders on glass substrate, and reheating to form microlens arrays. As compared to traditional polymer microlens arrays, glass microlens arrays are more reliable and therefore could be used in more critical applications. In this research, microlens arrays with different surface geometries were successfully fabricated on P-SK57 (Tg = 493 °C) glass substrate using a combination of compression molding and thermal reflow process. The major parameters that influence the final lens shape, including reheating temperature and holding time, were studied to establish a suitable fabrication process. A numerical simulation method was developed to evaluate the fabrication process.

Copyright © 2008 by ASME
Topics: Glass , Manufacturing

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