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Simulation of Crack Initiation at the Interface Edge Between Sub-Micron Thick Films Under Creep by Cohesive Zone Model

[+] Author Affiliations
Do Van Truong

Kyoto University, Kyoto, Japan

Paper No. MSEC_ICMP2008-72061, pp. 1-6; 6 pages
  • ASME 2008 International Manufacturing Science and Engineering Conference collocated with the 3rd JSME/ASME International Conference on Materials and Processing
  • ASME 2008 International Manufacturing Science and Engineering Conference, Volume 1
  • Evanston, Illinois, USA, October 7–10, 2008
  • Conference Sponsors: Manufacturing Engineering Division
  • ISBN: 978-0-7918-4851-7 | eISBN: 978-0-7918-3836-6
  • Copyright © 2008 by ASME


Delamination between sub-micron thick films is initiated at an interface edge due to creep deformation, and leads to the malfunction of microelectronic devices. In this study, the cohesive zone model approach with a cohesive law based on damage mechanics was developed to simulate crack initiation process at an interface edge between film layers under creep. Delamination experiments using a micro-cantilever bend specimen with a Sn/Si interface were conducted. The parameters charactering the cohesive law were calibrated by fitting displacement-time curves obtained by experiments and simulations. In addition, the order of the stress singularity, which increases with time and has a significant jump in its value at the crack initiation, was investigated.

Copyright © 2008 by ASME



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