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Electron and Focused Ion Beams in Thermal Science and Engineering

[+] Author Affiliations
Tae-Youl Choi

University of North Texas, Denton, TX

Dimos Poulikakos

ETH Zurich, Zurich, Switzerland

Paper No. HT2008-56097, pp. 665-669; 5 pages
  • ASME 2008 Heat Transfer Summer Conference collocated with the Fluids Engineering, Energy Sustainability, and 3rd Energy Nanotechnology Conferences
  • Heat Transfer: Volume 1
  • Jacksonville, Florida, USA, August 10–14, 2008
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 978-0-7918-4847-0 | eISBN: 0-7918-3832-3
  • Copyright © 2008 by ASME


Focused-ion-beam (FIB) is a useful tool for defining nanoscale structures. High energy heavy ions inherently exhibit destructive nature. A less destructive tool has been devised by using electron beam. FIB is mainly considered as an etching tool, while electron beam can be used for deposition purpose. In this paper, both etching and deposition method are demonstrated for applications in thermal science. Thermal conductivity of nanostructures (such as carbon nanotubes) was measured by using the FIB (and electron beam) nanolithography technique. Boiling characteristics was studied in a submicron heater that could be fabricated by using FIB.

Copyright © 2008 by ASME



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