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Reverse Monte Carlo Modeling of Signal Transport in Light-Pipe Radiation Thermometers

[+] Author Affiliations
Hakan Erturk

Bogazici University, Istanbul, Turkey

Ofodike A. Ezekoye, John R. Howell

University of Texas-Austin, Austin, TX

Paper No. HT2008-56180, pp. 633-640; 8 pages
doi:10.1115/HT2008-56180
From:
  • ASME 2008 Heat Transfer Summer Conference collocated with the Fluids Engineering, Energy Sustainability, and 3rd Energy Nanotechnology Conferences
  • Heat Transfer: Volume 1
  • Jacksonville, Florida, USA, August 10–14, 2008
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 978-0-7918-4847-0 | eISBN: 0-7918-3832-3
  • Copyright © 2008 by ASME

abstract

Rapid thermal processing (RTP) has been widely used by the semiconductor manufacturing industry. Light-pipe radiation thermometers are the predominant method to monitor the wafer temperature during rapid thermal processing. The errors associated with light-pipe measurements are great concerns across the industry due the extreme temperature sensitivity of the processes used to fabricate semiconductor devices during rapid thermal processing. Modeling of the light-pipes has helped understand the signal transport process and errors associated with the light pipe measurements. However, due to the smaller size of the light-pipe sensor area with respect to the total system area full scale modeling of such a system including the light pipe thermometer have not been possible due to the computational demand. In this paper, a reverse Monte Carlo method is developed to model the signal transport through a light-pipe thermometer used in a RTP system. The Monte Carlo model considers the spectral and angle dependent optical properties of the chamber and quartz materials. The reverse Monte Carlo model is applied to a simpler system with a quartz light pipe probe for verification against a model developed using a forward Monte Carlo method.

Copyright © 2008 by ASME

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