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Casimir Effect Influence on NEMS Cantilever Resonators

[+] Author Affiliations
Dumitru I. Caruntu, Martin Knecht, Roberto J. Zapata

The University of Texas Pan American, Edinburg, TX

Paper No. DSCC2011-5966, pp. 239-245; 7 pages
  • ASME 2011 Dynamic Systems and Control Conference and Bath/ASME Symposium on Fluid Power and Motion Control
  • ASME 2011 Dynamic Systems and Control Conference and Bath/ASME Symposium on Fluid Power and Motion Control, Volume 1
  • Arlington, Virginia, USA, October 31–November 2, 2011
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-5475-4
  • Copyright © 2011 by ASME


This paper investigates electrostatically actuated nanoelectromechanical (NEMS), to include Casimir effect, resonator response near natural frequency. Both electrostatic force and Casimir force are nonlinear. The method of multiple scales is used in a direct approach of the problem in the case of small actuation, damping, and Casimir effect. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform NEMS cantilever resonators for possible sensing applications are provided.

Copyright © 2011 by ASME



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