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Silicon Based Pore Systems for Emerging Biosensor Applications

[+] Author Affiliations
Trupthi Mathew, Punarvasu Joshi, Shalini Prasad, Michael Goryll, Andreas Spanias, Trevor J. Thornton

Arizona State University, Tempe, AZ

Paper No. IMECE2009-11707, pp. 263-270; 8 pages
  • ASME 2009 International Mechanical Engineering Congress and Exposition
  • Volume 2: Biomedical and Biotechnology Engineering
  • Lake Buena Vista, Florida, USA, November 13–19, 2009
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4375-8 | eISBN: 978-0-7918-3863-1
  • Copyright © 2009 by ASME


Recent research in the domain of single molecule biosensors aims at using silicon pore systems for the electrical detection of charged entities. Detection is achieved through resistive pulse measurements also known as Coulter counting. This work demonstrates the use of silicon based cylindrical micropores which can be used to detect biomolecules with high selectivity and robustness. The micropores used in the experiment were patterned using semiconductor processing techniques to have a final diameter of 5μm and a length of 30μm on a siliconsubstrate. The probes used in the study were silica beads which have been functionalized to detect two types of protein immunocomplexes: (i) biotin-avidin and (ii) immunoglobulin-G using its specific antibody within the silicon micropore system.

Copyright © 2009 by ASME
Topics: Biosensors , Silicon



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