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Freedom of Micro Manufacturing Tool-Free Series Production in Industrial Applications of Micro- and Nanotechnology

[+] Author Affiliations
Reiner Götzen

microTEC Gesellschaft für Mikrotechnologie mbH, Germany

Paper No. ESDA2008-59501, pp. 345-347; 3 pages
doi:10.1115/ESDA2008-59501
From:
  • ASME 2008 9th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 4: Fatigue and Fracture; Fluids Engineering; Heat Transfer; Mechatronics; Micro and Nano Technology; Optical Engineering; Robotics; Systems Engineering; Industrial Applications
  • Haifa, Israel, July 7–9, 2008
  • Conference Sponsors: International
  • ISBN: 978-0-7918-4838-8 | eISBN: 0-7918-3827-7
  • Copyright © 2008 by ASME

abstract

RMPD® , which stands for Rapid Micro Product Development, is a family of technologies designed to generate with a parallel batch process, microstructures, microsystems and/or MEMS or MOEMS in a parallel batch process. Photo polymerized monomer, oligomere and hybrismaterial (sol-gel) polymerized with uv-light and generate the system. The technology’s 3D-CSP (tree dimensional chip sice packaging), RMPD® -multimat (volume specific material propertys), RMPD® -stick2 (mechanical parts directly to a foil, wafer and so on) and RMPD® -nanoface (surface roughness in sub-nm range) have since 1996 been key elements in this worldwide-patented family of technologies, which has allowed System in Packing SiP to develop into a virtually tool-free production process. Additive and parallel processes give these technologies a costefficient and customer oriented strategic direction.

Copyright © 2008 by ASME

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