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Optimal Electrode Shaping for Precise Modal Electromechanical Filtering

[+] Author Affiliations
Arie Elka, Izhak Bucher

Technion-Israel Institute of Technology, Haifa, Israel

Paper No. ESDA2008-59279, pp. 307-317; 11 pages
  • ASME 2008 9th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 4: Fatigue and Fracture; Fluids Engineering; Heat Transfer; Mechatronics; Micro and Nano Technology; Optical Engineering; Robotics; Systems Engineering; Industrial Applications
  • Haifa, Israel, July 7–9, 2008
  • Conference Sponsors: International
  • ISBN: 978-0-7918-4838-8 | eISBN: 0-7918-3827-7
  • Copyright © 2008 by ASME


This paper addresses the optimal shape design of segmented spatial sensors and actuators that excite selected mode shapes and perform modal filtering. In MEMS filters, the input signal is converted to external electrostatic forces and in order to perform the desired filtering, the electrodes need to be shaped such that they excite only a desired part of the dynamics. These electrodes are usually designed according to some simplified theoretical identities, often representing lumped models, where in practice, Micro electromechanical structures dynamics are governed by a three dimensional continuum. An optimization scheme that shapes these electrodes to achieve optimal filtering is developed in this paper. The method provides a trimming methodology that can be performed on a real device and it illustrates the need for suitable modeling. Several simulated examples examine the effectiveness of the proposed optimization methods.

Copyright © 2008 by ASME



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