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Large Angle Parametrically Excited Tilting Micro Actuator

[+] Author Affiliations
Assaf Ya’akobovitz, Slava Krylov

Tel Aviv University, Tel Aviv, Israel

Paper No. ESDA2008-59104, pp. 289-293; 5 pages
  • ASME 2008 9th Biennial Conference on Engineering Systems Design and Analysis
  • Volume 4: Fatigue and Fracture; Fluids Engineering; Heat Transfer; Mechatronics; Micro and Nano Technology; Optical Engineering; Robotics; Systems Engineering; Industrial Applications
  • Haifa, Israel, July 7–9, 2008
  • Conference Sponsors: International
  • ISBN: 978-0-7918-4838-8 | eISBN: 0-7918-3827-7
  • Copyright © 2008 by ASME


We present novel operational principle of a tilting MEMS device based on parametric excitation and linear to angular motion transformation. The device is fabricated using a single layer of silicon on insulator (SOI) wafer and combines simple fabrication process with several beneficial features including large tilting angles, wide bandwidth, low sensitivity to deviation in geometrical and operational parameters and low actuation voltage. A theoretical feasibility and performance study was carried out using a lumped model of the device and verified by a coupled three-dimensional simulation. Parametric excitation of the tilting motion was demonstrated experimentally using and external piezoelectric transducer and tilting angles of 39° were registered. The suggested operational approach could be efficiently implemented in many MEMS based applications incorporating tilting elements including micromirrors, bio medical devices and inertial sensors.

Copyright © 2008 by ASME



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