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Numerical Simulation of Laser Beam Propagation in High Aspect Ratio Channel

[+] Author Affiliations
Benxin Wu, Sha Tao

Illinois Institute of Technology, Chicago, IL

Shuting Lei

Kansas State University, Manhattan, KS

Paper No. MSEC2009-84318, pp. 861-865; 5 pages
doi:10.1115/MSEC2009-84318
From:
  • ASME 2009 International Manufacturing Science and Engineering Conference
  • ASME 2009 International Manufacturing Science and Engineering Conference, Volume 1
  • West Lafayette, Indiana, USA, October 4–7, 2009
  • Conference Sponsors: Manufacturing Engineering Division
  • ISBN: 978-0-7918-4361-1 | eISBN: 978-0-7918-3859-4
  • Copyright © 2009 by ASME

abstract

Laser beam propagation in high aspect ratio channels has been simulated by solving two-dimensional Maxwell wave equation with the finite element method. It has been found that the optical polarization direction has a very important effect on laser beam propagation in the channel, and under certain polarization direction the laser beam profile may keep changing in a very complicated way as the beam propagates through the channel. The above important effects, revealed by the numerical simulation in this paper, need to be considered to realize an accurate modeling or a good process design for laser machining of high aspect ratio microstructures.

Copyright © 2009 by ASME

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